Review
Acoustics
Jose Joseph, Bo Ma, B. T. Khuri-Yakub
Summary: This article comprehensively reviews all the practical applications of CMUT up to now, providing detailed information on device properties and experimental details.
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
(2022)
Article
Engineering, Electrical & Electronic
Jie Liu, Xinyue Liu, Youming Luo, Atazaz Hassan, Yuyao Li, Quanfang Chen
Summary: An experimental study was conducted on a capacitive micromachined ultrasonic transducer (CMUT) made from a PMMA/graphene composite membrane. The use of graphene in the membrane provides superior electrical and mechanical properties. The dry transfer method used in fabricating the CMUTs ensures uniformity and eliminates common bonding issues.
IEEE SENSORS JOURNAL
(2023)
Article
Acoustics
Oluwafemi Joel Adelegan, Zachary A. Coutant, Xun Wu, Feysel Yalcin Yamaner, Omer Oralkan
Summary: This article presents a design strategy and fabrication process for improved concentric annular and novel spiral-shaped CMUTs for air-coupled applications, demonstrating the potential to enhance bandwidth by exploring design flexibility associated with CMUT technology.
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
(2021)
Article
Chemistry, Analytical
Xiao Huang, Hongliang Wang, Lijun Yu
Summary: This paper introduces the structure of the vacuum capacitive micromachined ultrasonic transducer and investigates the factors influencing its performance. The results show that both membrane parameters and cavity heights affect the performance parameters of the ultrasonic transducer. Selecting appropriate materials and membrane parameters is crucial for improving the efficiency of the ultrasonic transducer.
Article
Chemistry, Analytical
Tian Zhang, Wendong Zhang, Xingling Shao, Yuhua Yang, Zhihao Wang, Yang Wu, Yu Pei
Summary: This study eliminates the grating lobes generated by CMUT arrays by designing the positions of active elements during transmission and reception. An experiment with 256-element CMUT linear array was conducted to demonstrate that optimal sparse array configuration can reduce imaging artifacts.
Article
Chemistry, Analytical
Chang Hoon Lee, Beom Hoon Park, Young Hun Kim, Hyeong Geun Jo, Kwan Kyu Park
Summary: Ultrasonic particle manipulation is a noncontact method that uses the radiation force of ultrasonic waves to control microscale objects. This study demonstrates the manipulation of floating particles on an oil surface using a 2D array of CMUTs. The movement of the particles can be controlled by changing the excitation channels, allowing for precise and flexible manipulation.
Article
Engineering, Electrical & Electronic
Jie Liu, Yuyao Li, Youming Luo, Quanfang Chen
Summary: This study reports the feasibility of using a type of single-walled carbon nanotubes (SWCNTs)/Parylene-C composite membrane for the fabrication of a CMUT. The innovative aspect lies in the replacement of traditional silicon-based membranes with SWCNTs/Parylene-C composite membranes, which simplifies the process and reduces manufacturing costs. The SWCNTs/Parylene-C composite membrane exhibits excellent mechanical and electrical properties, making it a potential material for CMUT fabrication.
ACS APPLIED ELECTRONIC MATERIALS
(2023)
Article
Engineering, Electrical & Electronic
Young Seok Kwon, Hae Youn Kim, Dong-Hyun Kang, Dong Hun Kim, Jae-Woong Jeong, Byung Chul Lee
Summary: This study developed a 3D plane-wave imaging method using an annular CMUT array, which allows for real-time 3D imaging with a limited number of elements. The proposed device has a resonant frequency of 6.2 MHz and a collapse voltage of 65 V. The experimental results demonstrated the advantages of plane-wave imaging over the classic phased array and synthetic phased array for real-time imaging, making the annular CMUT array a promising mechanism for high frame rate 3D imaging.
SENSORS AND ACTUATORS A-PHYSICAL
(2023)
Article
Chemistry, Analytical
Bizhen Gao, Sai Zhang, Changde He, Renxin Wang, Yuhua Yang, Licheng Jia, Zhihao Wang, Yang Wu, Shumin Hu, Wendong Zhang
Summary: A new broadband matching layer based on 0-3 composite material significantly improves the performance of ultrasonic transducers. Experimental results show that this matching scheme greatly expands the bandwidth while improving reception sensitivity.
Article
Chemistry, Analytical
Fabian Merbeler, Sonja Wismath, Marco Haubold, Christian Bretthauer, Mario Kupnik
Summary: This paper presents a design for ultra-low-voltage operation CMUTs with enhanced output pressure. The design features an ultra-thin gap, small plate thickness, and a non-flexural piston for improved average displacement and higher output pressure. Simulation and experimental results confirm the feasibility and effectiveness of the design.
Article
Engineering, Electrical & Electronic
Yu Pei, Yu Zhang, Shumin Hu, Zhihao Wang, Yifan Li, Changde He, Sai Zhang, Renxin Wang, Wendong Zhang, Guojun Zhang
Summary: This paper presents a novel breast ultrasound tomography system based on CMUT, and proves the feasibility of the system and the applicability of the image reconstruction algorithm through simulation experiments and breast phantom experiments. By fusing multimodal images, a breast ultrasound tomography image with both edge information and structure information can be obtained simultaneously.
IEEE SENSORS JOURNAL
(2022)
Article
Chemistry, Analytical
Jorge Oevermann, Peter Weber, Steffen H. Tretbar
Summary: This study aimed to enable communication between medical implants using ultrasound technology, specifically utilizing capacitive micromachined ultrasonic transducers (CMUTs) integrated into the housing of the implants. Testing showed that with a silicone coupling layer, CMUTs can successfully operate behind the housing of an implant, facilitating communication over a minimum distance of 8 cm.
Article
Engineering, Electrical & Electronic
Hani H. Tawfik, Navpreet Singh, Mohannad Y. Elsayed, Frederic Nabki, Mourad N. El-Gamal
Summary: This paper introduces a novel operation mechanism for ultrasonic testing in-water, which utilizes surface-tension forces to elongate the water column and focus the ultrasonic beam. The proposed meniscus-mode operation mechanism is shown to amplify the ultrasonic signal compared to traditional fully-immersed setup, with a measured improvement in signal strength by a factor of approximately 2.24x.
SENSORS AND ACTUATORS A-PHYSICAL
(2021)
Article
Chemistry, Analytical
Yu Pei, Guojun Zhang, Yu Zhang, Wendong Zhang
Summary: The paper introduces a high-precision image reconstruction method for CMUT ring arrays based on ultrasound propagation in breast tissue, using time-reversal algorithms and FBP algorithms to respectively reconstruct sound speed distribution and acoustic attenuation distribution. Through numerical simulation and breast model experiments, it is verified that reconstruction deviation can be significantly reduced using different algorithms.
Review
Chemistry, Analytical
JiuJiang Wang, Xin Liu, YuanYu Yu, Yao Li, ChingHsiang Cheng, Shuang Zhang, PengUn Mak, Mang Vai, SioHang Pun
Summary: Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is a commonly used method with the advantages of intuitive understanding and convergence for collapse mode CMUT modeling. The collapse voltage of a CMUT is related to the effective gap height and electrode area, with analytical expressions available. Membrane deflections can be modeled using Timoshenko and von Karman equations, suitable for small and large deflections respectively.
Article
Chemistry, Physical
Loza F. Tadesse, Fareeha Safir, Chi-Sing Ho, Ximena Hasbach, Butrus (Pierre) Khuri-Yakub, Stefanie S. Jeffrey, Amr A. E. Saleh, Jennifer Dionne
JOURNAL OF CHEMICAL PHYSICS
(2020)
Article
Physiology
Martin Loynaz Prieto, Kamyar Firouzi, Butrus T. Khuri-Yakub, Daniel Madison, Merritt Maduke
JOURNAL OF GENERAL PHYSIOLOGY
(2020)
Review
Acoustics
Jose Joseph, Bo Ma, B. T. Khuri-Yakub
Summary: This article comprehensively reviews all the practical applications of CMUT up to now, providing detailed information on device properties and experimental details.
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
(2022)
Article
Engineering, Electrical & Electronic
Bo Ma, Kamyar Firouzi, Butrus T. Khuri-Yakub
Summary: This study introduces a novel multilayer masking technology for fabricating airborne CMUTs with multi-depth fluidic trenches, allowing for adjustable fractional bandwidth and receive sensitivity, as well as the fabrication of devices with different FBWs and sensitivities on the same wafer. The technology also demonstrates the ability to build MEMS with multi-depth micro/nanostructures.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
(2022)
Article
Multidisciplinary Sciences
Keith R. Murphy, Jordan S. Farrell, Juan L. Gomez, Quintin G. Stedman, Ningrui Li, Steven A. Leung, Cameron H. Good, Zhihai Qiu, Kamyar Firouzi, Kim Butts Pauly, Butrus Pierre T. Khuri-Yakub, Michael Michaelides, Ivan Soltesz, Luis de Lecea
Summary: We developed a system that can monitor the neural activity of specific cell types in the deep brain using focused ultrasound. By selectively adjusting the parameters, we were able to increase the activity of inhibitory neurons while suppressing the activity of excitatory neurons. This inhibitory effect was confirmed to be localized in the hippocampus through metabolic imaging.
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA
(2022)
Article
Chemistry, Multidisciplinary
Satoshi Honda, Minami Oka, Kazuki Fuke, Pierre T. T. Khuri-Yakub, Chi Nan Pai
Summary: Advances in vat photopolymerization (VP) 3D printing (3DP) technology have allowed for the production of precise 3D objects. This study reports on the fabrication of light- and high-intensity focused ultrasound (HIFU)-responsive cross-linked polymeric materials using VP-3DP. The compatibility between the photochemistry of HABI and photopolymerization allows for the introduction of reversible cross-links derived from HABIs in the resulting 3D-printed objects, enabling dynamic functionalities.
ADVANCED MATERIALS
(2023)
Article
Chemistry, Multidisciplinary
Fareeha Safir, Nhat Vu, Loza F. Tadesse, Kamyar Firouzi, Niaz Banaei, Stefanie S. Jeffrey, Amr. A. E. Saleh, Butrus (Pierre) T. Khuri-Yakub, Jennifer A. Dionne
Summary: Developed an acoustic bioprinter to digitize samples into droplets, which can be detected with SERS and ML techniques for rapid and sensitive pathogen detection. The combined bioprinting and SERS platform has significant applications in clinical, environmental, and industrial settings for pathogen detection.
Article
Engineering, Biomedical
Young Hun Kim, Chang Hoon Lee, Kamyar Firouzi, Beom Hoon Park, Joo Young Pyun, Jeong Nyeon Kim, Kwan Kyu Park, Butrus T. Khuri-Yakub
Summary: This study compares the abilities of three commonly used acoustic radiation force equations to predict mechanical stress in brain tissue. The results show that only the Reynolds stress force equation accurately predicts the strong mechanical stress generated at the focal point. This has important implications for analyzing mechanical stress in ultrasound neuromodulation.
PHYSICS IN MEDICINE AND BIOLOGY
(2023)
Proceedings Paper
Acoustics
Hae Youn Kim, Dong-Hyun Kang, Shyinyong Shim, Jung-mok Seo, Butrus T. Khuri-Yakub, Byung Chul Lee
Summary: This paper introduces a nano-silicon-spring-embedded CMUT that improves energy transduction efficiency and achieves giant pressure output at low voltage. This technology can be used for the design of portable and wearable ultrasound devices.
2022 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS)
(2022)
Proceedings Paper
Acoustics
Young Hun Kim, Jeong Nyeon Kim, Kwan Kyu Park, Kamyar Firouzi, Butrus T. Khuri-Yakub
Summary: This study presents an optimization method to improve the resolution of mechanical stresses in ultrasound neuromodulation by calculating arbitrary input pressures. The optimized result was verified through numerical simulation, showing the possibility of generating a single compressive or tensile stress at a specific location within the tissue.
2022 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS)
(2022)
Proceedings Paper
Engineering, Electrical & Electronic
Hae Youn Kim, Dong-Hyun Kang, Jinsik Kim, Butrus T. Khuri-Yakub, Byung Chul Lee
PROCEEDINGS OF THE 2020 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)
(2020)
Proceedings Paper
Engineering, Electrical & Electronic
Bo Ma, Kamyar Firouzi, Kevin Brenner, Butrus T. Khuri-Yakub
2019 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)
(2019)
Proceedings Paper
Engineering, Electrical & Electronic
Ajay Singhvi, Bo Ma, Johannes Daniel Scharwies, Jose R. Dinneny, Butrus T. Khuri-Yakub, Amin Arbabian
2019 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)
(2019)
Proceedings Paper
Engineering, Electrical & Electronic
Quintin Stedman, John D. Fox, Butrus T. Khuri-Yakub
2019 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)
(2019)
Proceedings Paper
Automation & Control Systems
Lei Gu, Quintin Stedman, Morten Rasmussen, Chi-Nan Pai, Kevin Brenner, Bo Ma, Arif Sanli Ergun, Butrus Khuri-Yakub, Juan Rivas Davila
2019 IEEE 20TH WORKSHOP ON CONTROL AND MODELING FOR POWER ELECTRONICS (COMPEL)
(2019)