Fabricating microfluidic valve master molds in SU-8 photoresist

Title
Fabricating microfluidic valve master molds in SU-8 photoresist
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 24, Issue 5, Pages 057001
Publisher
IOP Publishing
Online
2014-04-01
DOI
10.1088/0960-1317/24/5/057001

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