Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 25, Issue 1, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/25/1/015008
Keywords
bilayer film; intrinsic stress; micro-valve array; tactile tablet
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The design, fabrication, and characterization of a strained bilayer film for use in a micro-valve for a reconfigurable tactile tablet for vision-impaired individuals is presented. The bilayer film consists of a compressive and tensile layer to cause the film to coil and retract from the gas channel when the micro-valve is in the open position. A novel support structure that improves yield and controls the direction of coiling is demonstrated. An array of 225 strained bilayer films was designed and fabricated. Each strained bilayer film was able to be actuated individually with a voltage that ranged between 60 and 70 V. The relationship between the applied voltage and the percentage open of the micro-valve is found to be linear over an extended voltage range, enabling the reconfigurable tactile tablet to produce the equivalent of a grayscale image.
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