Localized etching of polymer films using an atmospheric pressure air microplasma jet
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Title
Localized etching of polymer films using an atmospheric pressure air microplasma jet
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 25, Issue 1, Pages 015010
Publisher
IOP Publishing
Online
2014-12-30
DOI
10.1088/0960-1317/25/1/015010
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