Two complementary ways of thin-metal-film patterning using laser beam interference and direct ablation

Title
Two complementary ways of thin-metal-film patterning using laser beam interference and direct ablation
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 9, Pages 095034
Publisher
IOP Publishing
Online
2013-08-28
DOI
10.1088/0960-1317/23/9/095034

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