A highly sensitive pressure sensor using a Au-patterned polydimethylsiloxane membrane for biosensing applications

Published 2013 View Full Article

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Title
A highly sensitive pressure sensor using a Au-patterned polydimethylsiloxane membrane for biosensing applications
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 2, Pages 025022
Publisher
IOP Publishing
Online
2013-01-21
DOI
10.1088/0960-1317/23/2/025022

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