A three-axis high-resolution capacitive tactile imager system based on floating comb electrodes

Title
A three-axis high-resolution capacitive tactile imager system based on floating comb electrodes
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 7, Pages 075004
Publisher
IOP Publishing
Online
2013-05-21
DOI
10.1088/0960-1317/23/7/075004

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