Wide-range frequency selectivity in an acoustic sensor fabricated using a microbeam array with non-uniform thickness

Published 2013 View Full Article

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Title
Wide-range frequency selectivity in an acoustic sensor fabricated using a microbeam array with non-uniform thickness
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 11, Pages 115014
Publisher
IOP Publishing
Online
2013-10-21
DOI
10.1088/0960-1317/23/11/115014

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