Molybdenum disulfide dc contact MEMS shunt switch

Title
Molybdenum disulfide dc contact MEMS shunt switch
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 4, Pages 045026
Publisher
IOP Publishing
Online
2013-03-19
DOI
10.1088/0960-1317/23/4/045026

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