A low-profile three-dimensional neural probe array using a silicon lead transfer structure

Title
A low-profile three-dimensional neural probe array using a silicon lead transfer structure
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 9, Pages 095013
Publisher
IOP Publishing
Online
2013-08-06
DOI
10.1088/0960-1317/23/9/095013

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