Modeling and bonding-free fabrication of flexible fluidic microactuators with a bending motion

Title
Modeling and bonding-free fabrication of flexible fluidic microactuators with a bending motion
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 4, Pages 045012
Publisher
IOP Publishing
Online
2013-03-01
DOI
10.1088/0960-1317/23/4/045012

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