Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining

Published 2013 View Full Article

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Title
Fabrication of piezoelectric P(VDF-TrFE) microcantilevers by wafer-level surface micromachining
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 9, Pages 095023
Publisher
IOP Publishing
Online
2013-08-28
DOI
10.1088/0960-1317/23/9/095023

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