Fabrication and characterization of laterally-driven piezoelectric bimorph MEMS actuator with sol–gel-based high-aspect-ratio PZT structure

Published 2013 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Fabrication and characterization of laterally-driven piezoelectric bimorph MEMS actuator with sol–gel-based high-aspect-ratio PZT structure
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 6, Pages 065014
Publisher
IOP Publishing
Online
2013-05-03
DOI
10.1088/0960-1317/23/6/065014

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.