Development of a proximity sensor with vertically monolithic integrated inductive and capacitive sensing units

Published 2013 View Full Article

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Title
Development of a proximity sensor with vertically monolithic integrated inductive and capacitive sensing units
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 3, Pages 035013
Publisher
IOP Publishing
Online
2013-01-28
DOI
10.1088/0960-1317/23/3/035013

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