Interfacing of differential-capacitive biomimetic hair flow-sensors for optimal sensitivity

Published 2013 View Full Article

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Journal

JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Volume 23, Issue 3, Pages 035010

Publisher

IOP Publishing

Online

2013-01-25

DOI

10.1088/0960-1317/23/3/035010

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JOURNAL OF MICROMECHANICS AND MICROENGINEERING

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