Characterization on the fatigue performance of a piezoelectric microvalve with a microfabricated silicon valve seat

Published 2013 View Full Article

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Title
Characterization on the fatigue performance of a piezoelectric microvalve with a microfabricated silicon valve seat
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 24, Issue 1, Pages 015013
Publisher
IOP Publishing
Online
2013-12-09
DOI
10.1088/0960-1317/24/1/015013

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