Design and fabrication of an AT-cut quartz phononic Lamb wave resonator

Title
Design and fabrication of an AT-cut quartz phononic Lamb wave resonator
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 6, Pages 065025
Publisher
IOP Publishing
Online
2013-05-13
DOI
10.1088/0960-1317/23/6/065025

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