Bulk micromachined energy harvesters employing (K, Na)NbO3thin film

Title
Bulk micromachined energy harvesters employing (K, Na)NbO3thin film
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 23, Issue 3, Pages 035029
Publisher
IOP Publishing
Online
2013-02-06
DOI
10.1088/0960-1317/23/3/035029

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