Fabrication of carbon nanostructures using photo-nanoimprint lithography and pyrolysis

Published 2012 View Full Article

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Title
Fabrication of carbon nanostructures using photo-nanoimprint lithography and pyrolysis
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 4, Pages 045024
Publisher
IOP Publishing
Online
2012-03-24
DOI
10.1088/0960-1317/22/4/045024

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