Fabrication of periodic nanostructures by single-point diamond turning with focused ion beam built tool tips

Published 2012 View Full Article

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Title
Fabrication of periodic nanostructures by single-point diamond turning with focused ion beam built tool tips
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 11, Pages 115014
Publisher
IOP Publishing
Online
2012-09-27
DOI
10.1088/0960-1317/22/11/115014

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