Prevention of sidewall redeposition of etched byproducts in the dry Au etch process

Published 2012 View Full Article

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Title
Prevention of sidewall redeposition of etched byproducts in the dry Au etch process
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 7, Pages 074004
Publisher
IOP Publishing
Online
2012-06-23
DOI
10.1088/0960-1317/22/7/074004

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