Hydrofluoric acid-assisted bonding of diatoms with SiO2-based substrates for microsystem application

Published 2012 View Full Article

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Title
Hydrofluoric acid-assisted bonding of diatoms with SiO2-based substrates for microsystem application
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 3, Pages 035021
Publisher
IOP Publishing
Online
2012-02-22
DOI
10.1088/0960-1317/22/3/035021

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