Improving the performance of biomimetic hair-flow sensors by electrostatic spring softening

Published 2012 View Full Article

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Title
Improving the performance of biomimetic hair-flow sensors by electrostatic spring softening
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 6, Pages 065026
Publisher
IOP Publishing
Online
2012-05-22
DOI
10.1088/0960-1317/22/6/065026

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