Fabrication and characterization of MEMS-based PZT/PZT bimorph thick film vibration energy harvesters

Published 2012 View Full Article

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Title
Fabrication and characterization of MEMS-based PZT/PZT bimorph thick film vibration energy harvesters
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 22, Issue 9, Pages 094007
Publisher
IOP Publishing
Online
2012-08-24
DOI
10.1088/0960-1317/22/9/094007

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