A batch-fabricated laser-micromachined PDMS actuator with stamped carbon grease electrodes

Published 2011 View Full Article

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Title
A batch-fabricated laser-micromachined PDMS actuator with stamped carbon grease electrodes
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 21, Issue 2, Pages 027002
Publisher
IOP Publishing
Online
2011-01-19
DOI
10.1088/0960-1317/21/2/027002
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