Controlling damping and quality factors of silicon microcantilevers by selective metallization

A Microcantilever Platform for Measuring Internal Friction in Thin Films Using Thermoelastic Damping for Calibration

(2011) Guruprasad Sosale et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Study of lateral mode SOI-MEMS resonators for reduced anchor loss

(2011) Joshua E-Y Lee et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Cantilever-like micromechanical sensors

(2011) Anja Boisen et al.   REPORTS ON PROGRESS IN PHYSICS

The relationship between material properties, device design, and the sensitivity of resonant mechanical sensors

(2009) Philip S. Waggoner et al.   JOURNAL OF APPLIED PHYSICS

Effects of gold patterning on the bending profile and frequency response of a microcantilever

(2009) Dongkyu Lee et al.   JOURNAL OF APPLIED PHYSICS

Experimental Determination of the Q-factors of Microcantilevers Coated With Thin Metal Films

(2009) A. R. Klempner et al.   STRAIN

Theory of Thermoelastic Damping in Micromechanical Resonators With Two-Dimensional Heat Conduction

(2008) S. Prabhakar et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS