Dynamic characteristics of a dielectric elastomer-based microbeam resonator with small vibration amplitude

An analytical model is developed in the current work to analyze the dynamic characteristics of a dielectric elastomer (DE)-based microbeam resonator. The ambient pressure effect is taken into account by using the squeeze-film theory. Based on the Euler-Bernoulli beam model, approximate analytical solutions for the quality factor (Q-factor) and the resonant frequencies of the resonator have been derived using Raleigh's method for small amplitude vibration. The results indicate that the ambient pressure has significant effects on the Q-factor and the resonant frequency shift ratio, which represent the dynamic performance of the resonator. The active frequency tuning for such a resonator becomes feasible by changing the applied electrical voltage. It is found that high voltage is beneficial for improving the sensitivity of the resonator. However, high voltage may put the resonator at the risk of mechanical instability. The cut-off voltage for buckling has also been studied to predict the mechanical integrity of the resonator. This study is expected to be useful for design and applications of DE-based microresonators.