A one-step photolithography method for fabrication of a staggered herringbone mixer using inclined UV lithography

Published 2011 View Full Article

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Title
A one-step photolithography method for fabrication of a staggered herringbone mixer using inclined UV lithography
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 21, Issue 7, Pages 077001
Publisher
IOP Publishing
Online
2011-06-09
DOI
10.1088/0960-1317/21/7/077001
References
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