An easy method to perform e-beam negative tone lift-off fabrication on dielectric material with a sandwiched conducting polymer layer

Published 2011 View Full Article

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Title
An easy method to perform e-beam negative tone lift-off fabrication on dielectric material with a sandwiched conducting polymer layer
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 21, Issue 6, Pages 065021
Publisher
IOP Publishing
Online
2011-05-12
DOI
10.1088/0960-1317/21/6/065021
References
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