Parylene C-on-photoresist (POP): a low temperature spacer scheme for polymer/metal nanowire fabrication

Fabrication and Characterization of a Parylene-Based Three-Dimensional Microelectrode Array for Use in Retinal Prosthesis

(2010) Renxin Wang et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A parylene-filled-trench technique for thermal isolation in silicon-based microdevices

(2009) Yinhua Lei et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

An electromagnetic micro energy harvester based on an array of parylene cantilevers

(2009) Ibrahim Sari et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Plasma removal of Parylene C

(2008) Ellis Meng et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

The multi-spacer patterning technique: a non-lithographic technique for terascale integration

(2008) G F Cerofolini et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Flexible parylene-based multielectrode array technology for high-density neural stimulation and recording

(2007) D RODGER et al.   SENSORS AND ACTUATORS B-CHEMICAL