Thermal fracture of oxidized polydimethylsiloxane during soft lithography of nanopost arrays

Title
Thermal fracture of oxidized polydimethylsiloxane during soft lithography of nanopost arrays
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 21, Issue 5, Pages 054013
Publisher
IOP Publishing
Online
2011-04-29
DOI
10.1088/0960-1317/21/5/054013

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