Batch production of single-crystal diamond bridges and cantilevers for microelectromechanical systems

Title
Batch production of single-crystal diamond bridges and cantilevers for microelectromechanical systems
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 8, Pages 085002
Publisher
IOP Publishing
Online
2010-06-23
DOI
10.1088/0960-1317/20/8/085002

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