A novel ultra-planar, long-stroke and low-voltage piezoelectric micromirror

Published 2010 View Full Article

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Title
A novel ultra-planar, long-stroke and low-voltage piezoelectric micromirror
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 6, Pages 064010
Publisher
IOP Publishing
Online
2010-06-02
DOI
10.1088/0960-1317/20/6/064010
References
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