Effects of size and defects on the elasticity of silicon nanocantilevers

Title
Effects of size and defects on the elasticity of silicon nanocantilevers
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 6, Pages 064012
Publisher
IOP Publishing
Online
2010-06-02
DOI
10.1088/0960-1317/20/6/064012

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