Some considerations of effects-induced errors in resonant cantilevers with the laser deflection method

Title
Some considerations of effects-induced errors in resonant cantilevers with the laser deflection method
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 10, Pages 105027
Publisher
IOP Publishing
Online
2010-09-30
DOI
10.1088/0960-1317/20/10/105027

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