MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal design

Emergence of New Mechanical Functionality in Materials via Size Reduction

(2009) Julia R. Greer et al.   ADVANCED FUNCTIONAL MATERIALS

Pirani Vacuum Gauges Using Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization of MEMS Vacuum Packaging

(2009) Ebru Sagiroglu Topalli et al.   IEEE SENSORS JOURNAL

MEMS Endoscopic Tactile Sensor: Toward In-Situ and In-Vivo Tissue Softness Characterization

(2009) Saeed Sokhanvar et al.   IEEE SENSORS JOURNAL

Flexible Tactile Sensor for Tissue Elasticity Measurements

(2009) Peng Peng et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Simulation, fabrication and characterization of a 3D piezoresistive force sensor

(2008) A. Tibrewala et al.   SENSORS AND ACTUATORS A-PHYSICAL

An axial strain modulated double-ended tuning fork electrometer

(2008) Joshua E.-Y. Lee et al.   SENSORS AND ACTUATORS A-PHYSICAL