Large arrays of chemo-mechanical nanoswitches for ultralow-power hydrogen sensing

Title
Large arrays of chemo-mechanical nanoswitches for ultralow-power hydrogen sensing
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 10, Pages 105019
Publisher
IOP Publishing
Online
2010-09-22
DOI
10.1088/0960-1317/20/10/105019

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