Fabrication of high-compact nanowires using alternating photoresist ashing and spacer technology

Published 2010 View Full Article

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Title
Fabrication of high-compact nanowires using alternating photoresist ashing and spacer technology
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 8, Pages 085029
Publisher
IOP Publishing
Online
2010-07-20
DOI
10.1088/0960-1317/20/8/085029
References
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