Design and fabrication of MEMS-controlled probes for studying the nano-interface underin situTEM observation

Title
Design and fabrication of MEMS-controlled probes for studying the nano-interface underin situTEM observation
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 7, Pages 075011
Publisher
IOP Publishing
Online
2010-05-22
DOI
10.1088/0960-1317/20/7/075011

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