High quantum efficiency annular backside silicon photodiodes for reflectance pulse oximetry in wearable wireless body sensors

Title
High quantum efficiency annular backside silicon photodiodes for reflectance pulse oximetry in wearable wireless body sensors
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 7, Pages 075020
Publisher
IOP Publishing
Online
2010-06-08
DOI
10.1088/0960-1317/20/7/075020

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