A batch process micromachined thermoelectric energy harvester: fabrication and characterization

Published 2010 View Full Article

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Title
A batch process micromachined thermoelectric energy harvester: fabrication and characterization
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 10, Pages 104005
Publisher
IOP Publishing
Online
2010-09-15
DOI
10.1088/0960-1317/20/10/104005
References
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