X-ray fabrication of SAW resonators with narrow electrodes in thick high-aspect-ratio polymer templates

Title
X-ray fabrication of SAW resonators with narrow electrodes in thick high-aspect-ratio polymer templates
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 7, Pages 075031
Publisher
IOP Publishing
Online
2010-06-15
DOI
10.1088/0960-1317/20/7/075031

Ask authors/readers for more resources

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started