Femtosecond laser micromachining of silicon with an external electric field

Published 2009 View Full Article

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Title
Femtosecond laser micromachining of silicon with an external electric field
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 1, Pages 017001
Publisher
IOP Publishing
Online
2009-11-19
DOI
10.1088/0960-1317/20/1/017001
References
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