A pseudo 3D glass microprobe array: glass microprobe with embedded silicon for alignment and electrical interconnection during assembly

Published 2009 View Full Article

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Title
A pseudo 3D glass microprobe array: glass microprobe with embedded silicon for alignment and electrical interconnection during assembly
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 2, Pages 025014
Publisher
IOP Publishing
Online
2009-12-24
DOI
10.1088/0960-1317/20/2/025014
References
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