Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 8, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/19/8/085011
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Funding
- Swedish Research Council (VR)
- Swedish Foundation for Strategic Research (SSF) [A3 05:204]
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The fabrication of capped microstructures such as channels or cavities typically involves multiple production steps. In this work, we demonstrate a fabrication procedure that enables the generation of capped monolithic microstructures of arbitrary geometry in one single SU-8 exposure step. The presented method also enables the embedment of metal self-aligned surfaces for use as electrodes or mirrors. The devices furthermore demonstrate a capability of increasing fluorescent collection, as measured by an epi-fluorescent inverted microscope, by up to 15-fold.
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