A lateral-axis micromachined tuning fork gyroscope with torsionalZ-sensing and electrostatic force-balanced driving

Published 2009 View Full Article

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Title
A lateral-axis micromachined tuning fork gyroscope with torsionalZ-sensing and electrostatic force-balanced driving
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 2, Pages 025007
Publisher
IOP Publishing
Online
2009-12-16
DOI
10.1088/0960-1317/20/2/025007
References
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