Micromachining SU-8 pivot structures using AZ photoresist as direct sacrificial layers for a large wing displacement

Title
Micromachining SU-8 pivot structures using AZ photoresist as direct sacrificial layers for a large wing displacement
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 2, Pages 025005
Publisher
IOP Publishing
Online
2009-12-16
DOI
10.1088/0960-1317/20/2/025005

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