Characterization of heavily doped polysilicon films for CMOS-MEMS thermoelectric power generators

Published 2009 View Full Article

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Title
Characterization of heavily doped polysilicon films for CMOS-MEMS thermoelectric power generators
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 12, Pages 125029
Publisher
IOP Publishing
Online
2009-11-17
DOI
10.1088/0960-1317/19/12/125029
References
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