Squeeze-film damping of flexible microcantilevers at low ambient pressures: theory and experiment

Published 2009 View Full Article

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Title
Squeeze-film damping of flexible microcantilevers at low ambient pressures: theory and experiment
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 10, Pages 105029
Publisher
IOP Publishing
Online
2009-09-25
DOI
10.1088/0960-1317/19/10/105029

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