Reverse pattern duplication utilizing a two-step metal lift-off process via nanoimprint lithography

Published 2009 View Full Article

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Title
Reverse pattern duplication utilizing a two-step metal lift-off process via nanoimprint lithography
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 10, Pages 105022
Publisher
IOP Publishing
Online
2009-09-23
DOI
10.1088/0960-1317/19/10/105022
References
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